Agus Ismangil

Judul	:	The Effect of Electrical Conductivity of LiTaO3 Thin film to Temperature Variations
Abstrak	:	Lithium tantalite has the chemical formula LiTaO3, with Si Type-P (100) substrate with chemical solution deposition and spin coating methods with a speed of 3000 rpm for 30 seconds. LiTaO3 has a concentration of 2.5M and annealing temperatures of 550 ° C, 600 ° C, 650 ° C, 700 ° C, 750 ° C, 800 ° C. LiTaO3 thin films are characterized by LCR meters. The value of the electrical conductivity of a material can increase because it conducts an electric current. The electrical conductivity value of LiTaO3 films obtained ranged from 10-6 S/cm to 10-5 S/cm. The effect of annealing temperature on the value of optimal electrical conductivity when the annealing temperature is 800 °C but the value of electrical conductivity decreases when the annealing temperature is carried out at 750 °C. The decrease in the value of electrical conductivity is related to the annealing temperature caused by the evaporation experienced by the thin film LiTaO3. The value of the electrical conductivity obtained from the LiTaO3 films ranged from 1.90 - 9.95 µS/cm, this results indicate that the thin film LiTaO3 made is a semiconductor material.
Tahun	:	2020	Media Publikasi	:	Jurnal Internasional
Kategori	:	Jurnal	No/Vol/Tahun	:	6 / 29 / 2020
ISSN/ISBN	:	2005-4238 IJAST
PTN/S	:	Universitas Pakuan	Program Studi	:	ILMU KOMPUTER
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