Agus Ismangil

Judul	:	Analisis Lithium Tantalat (LiTaO3) Didoping Niobium Bervariasi Suhu
Abstrak	:	Litium tantalite memiliki formula kimia LiTaO3, dengan substrat Si Tipe –P (100) dengan metode chemical solution deposition dan spin coating dengan kecepatan 3000 rpm selama 30 seconds. LiTaO3 memiliki konsentrasi 2.5M dan suhu annealing 550°C, 600°C, 650°C, 700°C, 750°C, 800 °C. Film tipis LiTaO3 dikarakterisasi dengan ocean optic spectroscopy. Hasil dari karakterisasi spektroskopi film tipis LiTaO3 absorbansi maksimum terjadi pada daerah infra merah yaitu pada panjang gelombang 780 nm, puncak absorbansi tertinggi pada film lithium tantalat pada suhu annealing 800oC dengan kata lain film LiTaO3 banyak menyerap energi foton dari cahaya yang mengenainya. Kata Kunci : LiTaO3, Absorbansi, spin coating, annealing
Tahun	:	2018	Media Publikasi	:	Seminar Nasional
Kategori	:	Prosiding	No/Vol/Tahun	:	1 / 15 / 2018
ISSN/ISBN	:	978-602-5614-35-4
PTN/S	:	Universitas pakuan	Program Studi	:	ILMU KOMPUTER
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