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Detail Karya Ilmiah Dosen

Agus Ismangil, Subiyanto, Sudrajat, Wahyu Gendam Prakoso

Judul : The Effect of Electrical Conductivity of LiTaO3 Thin film to Temperature Variations
Abstrak :

Lithium tantalite has the chemical formula LiTaO3, with Si Type-P (100) substrate with
chemical solution deposition and spin coating methods with a speed of 3000 rpm for 30
seconds. LiTaO3 has a concentration of 2.5M and annealing temperatures of 550 ° C, 600
° C, 650 ° C, 700 ° C, 750 ° C, 800 ° C. LiTaO3 thin films are characterized by LCR
meters. The value of the electrical conductivity of a material can increase because it
conducts an electric current. The electrical conductivity value of LiTaO3 films obtained
ranged from 10-6 S/cm to 10-5 S/cm. The effect of annealing temperature on the value of
optimal electrical conductivity when the annealing temperature is 800 °C but the value of
electrical conductivity decreases when the annealing temperature is carried out at 750
°C. The decrease in the value of electrical conductivity is related to the annealing
temperature caused by the evaporation experienced by the thin film LiTaO3. The value of
the electrical conductivity obtained from the LiTaO3 films ranged from 1.90 - 9.95 µS/cm,
this results indicate that the thin film LiTaO3 made is a semiconductor material.

Tahun : 2020 Media Publikasi : Jurnal Internasional
Kategori : Jurnal No/Vol/Tahun : 6 / 29 / 2020
ISSN/ISBN : 2005-4238
PTN/S : Universitas Pakuan Program Studi : TEKNIK SIPIL
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