Abstrak |
: |
Litium tantalite memiliki formula kimia LiTaO3, dengan substrat Si Tipe –P (100)
dengan metode chemical solution deposition dan spin coating dengan kecepatan
3000 rpm selama 30 seconds. LiTaO3 memiliki konsentrasi 2.5M dan suhu annealing
550°C, 600°C, 650°C, 700°C, 750°C, 800 °C. Film tipis LiTaO3 dikarakterisasi
dengan ocean optic spectroscopy. Hasil dari karakterisasi spektroskopi film tipis
LiTaO3 absorbansi maksimum terjadi pada daerah infra merah yaitu pada panjang
gelombang 780 nm, puncak absorbansi tertinggi pada film lithium tantalat pada suhu
annealing 800oC dengan kata lain film LiTaO3 banyak menyerap energi foton dari
cahaya yang mengenainya.
Kata Kunci : LiTaO3, Absorbansi, spin coating, annealing |
Bibliography |
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[1] Saito, T, I. 1996. Kimia Anorganik. Permiission of Iwanami Shaten Publisher.
[2] Milan J, Lauhon L, and Allen J. 2005. Photoconductivity of Semiconducting. CdS.
[3]Paula M.V, Nathalie B, Sebastian Z, Pedro F, Maria H.F. 2014. Are lithium niobate (LiNbO3)
and lithium tantalate (LiTaO3) ferroelectrics bioactive. Journal Materials Science and
Engineering 39:395-402.
[4] Milton O. 1991. The Materials Science of Thin Film. Academic Press Limited, London.
[5]Irzaman, A. Fuad, and M. Barmawi. 2001. Spectral Response of Al/Si Photodiodes for IR
Sensor. Proceeding Instrumentation, Measurement, and Communications for the Future,
Indonesian German Conference (IGC), Bandung: 340 – 342.
[6] Omar, M.A. 2007. Elementary Solid State Physics. Addison-Wesley Publishing Company.
[7]Song I et al. 2004. Diffusion of Zn in stoichiometric LiTaO3. Journal of Crystal Growth 270:
568–572.
[8] Rio S.R, M.lida.1999. Fisika dan Teknologi Semikonduktor. PT.Pradnya Paramita: Jakarta.
[9] Kwok, K. N. 1995.Complete Guide to Semiconductor Device. McGraw-Hill, inc.
[10] Kuneva M, Christova K and Tonchev S. 2012. Proton-exchanged optical waveguides in
LiTaO3: phase composition and stress. Journal of Physics: Conference Series. 398.
[11] Liu X. 2005. Nanoscale chemical ething of near-stoichiometric lithium tantalite. Journal
Material sains 97(1):30-38. [12] Sutrisno. 1986. Elektronika Teori dan Penerapannya. Bandung: Institut Teknologi Bandung.
[13] Tipler PA.1991. Physics for Scientist and Engineers. Worth Publisher Inc.
[14] Beata Z, Ewa M, Ryszard J. K. 2012. Synthesis, characterization and photocatalytic
properties of lithium tantalite. Journal Materials Characterization 68:71-78.
[15] Chaidir A, Kisworo D. 2007. Pengaruh pemanasan terhadap struktur-mikro, sifat mekanik
dan korosi paduan Zr-Nb-Sn-Fe. [Hasil-hasil Penelitian EBN]. ISSN 0854-5561.
[16] Cullity, B.D. 1956. Elements of X-Ray Diffraction. Massachusetts, Addison Wesley
Publishing Company.
[17] Irzaman, Maddu A, Syafutra H dan Ismangil A. 2010. Uji konduktivitas listrik dan
dielektrik film tipis lithium tantalate (LiTaO3) yang didadah niobium pentaoksida (Nb2O5)
menggunakan metode chemical solution deposition. Prosiding Seminar Nasional Fisika,
Bandung: 175-183.
[18] Malvino A V. 1990. Prinsip-prinsip Elektronika. Jakarta: Salemba Teknika.
[19] Uchino K. 2000. Ferroelectric Devices. New York: Marcel Dekker, In
[20] Jun L, Yang L, Zhongxiang Z, Ruyan G, Amar S, and Bhalla. 2013. Structure and dielectric
properties of niobium-rich potassium lithium tantalate niobate single crystals. Journal
Ceramics International 39:8537-8541. [21] Schwartz, Robert W. 1997. Chemical Solution Deposition of Perovskite Thin Film. Chem.
Mater: 2325-2340.
[22] Seo, J.Y, Park S.W. 2004. Chemical Mechanical Planarization Characteristic of
Ferroelectric Film for FRAM Applications. International Journal of Korean Physics society |